The 2021–2027 PERTINENCE State-Region Plan contract provided funding for the acquisition of a 100 kV electron beam lithography system. This equipment was funded by the Sud Region, the European Union through the ERDF program, and the CNRS

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• Contact the manager : Maksym Gromovyi.

The 2021–2027 PERTINENCE State-Region Plan contract also funded the acquisition of a PECVD (plasma-enhanced chemical vapor deposition) deposition reactor. This reactor was funded by the DRARI, the Alpes-Maritimes Department, the Université Côte d’Azur, and the CNRS.