Epitaxy center - Overview

The Epitaxy Division brings together the various crystal growth activities that form the core of the research conducted at CRHEA. It is composed of researchers, faculty members, and engineers who are experts in epitaxy. They work daily with epitaxy reactors primarily dedicated to the growth of semiconductors (materials with high bandgap energy, 2D materials, materials for photovoltaics). The various pieces of equipment are grouped into two platforms distinguished by the type of epitaxy method used: molecular beam epitaxy (MBE) in ultra-high vacuum (8 reactors) and chemical vapor deposition (CVD, 6 reactors). In addition, the platform is equipped with a high-temperature N2 annealing furnace (1700°C).

The center has three main objectives:

• Fabricate state-of-the-art structures based on wide-bandgap materials (Al, Ga, In-N, Zn, Mg-O, and SiC) for applications in electronics (transistors, diodes, and sensors), optoelectronics (LEDs and lasers), and photonics (metasurfaces and photonic circuits) on various host substrates (primarily sapphire and silicon).
• Develop new materials for photovoltaics, such as (Zn,Mg)-N and halide perovskites of the Cs(Pb/Sn)Br type.
• Exploring the epitaxy of 2D materials (graphene, BN, transition metal dichalcogenides—TMDs) as well as van der Waals heterostructures.

Platform managers : Stéphane Vézian and Eric Frayssinet

CVD Epitaxy Platform

Summary of CVD equipment:

* The carbon footprint of some of the reactors was estimated based on costs (purchase price including depreciation and operating costs) entered into the following purchase simulator: https://apps.labos1point5.org/ purchases-simulator

Pricing

Prices are listed exclusive of tax and in euros. They vary depending on the applicant’s status: a private company, an academic institution (university, other public research institution, etc.), or a CNRS unit. The base rate is determined by taking into account all costs associated with producing a standard epitaxial sample. This “base” rate may be adjusted depending on the complexity of the requested sample and/or the calibrations required for its production. For all requests, please email a detailed description of the desired sample structure to the platform managers Stéphane Vézian and Eric Frayssinet.

These rates do not include the supply of substrates, which may be provided by customers.
If not, the cost of the substrates will be billed separately.