A cleanroom is a room with a controlled environment (temperature, humidity, and dust levels) that maintains a slight positive pressure relative to the outside; the class corresponds to the number of particles of one micron or smaller per cubic foot).

If you have any questions about the technology platform, please contact the manager : Sébastien Chenot.

Plan de la salle blanche vue avant
3D floor plan of the cleanroom, front view
Plan de la salle blanche vue arriere
3D floor plan of the cleanroom, rear view
  1. Oxford System 100 RIE-ECR High-Density Plasma Ion Etching System
  1. Comcept EVA 450 Electron Beam Deposition System
  2. RIBER frame for Joule-effect evaporation deposition
  3. MRC frame for sputtering deposition
  1. Class 100 laminar flow hoods (Chemical processing)
  2. SPS POLOS SPIN150i Rotating Table (Sample Cleaning)
  3. Class 100 Laminar Flow Hoods (Solvents - Cleaning)
  4. Class 100 laminar flow hoods with the Karl Süss RC8 Gyrset and SUSS Labspin6 rotary tables (resin dispensing)
  1. CORIAL ICP-RIE 210IL high-density plasma etching system
  1. Memmert UN30Plus Drying Oven
  1. Karl Süss MJB3 mask aligner (under a Class 100 laminar flow hood)
  2. Reichert Polyvar microscope (under a Class 100 laminar flow hood)
  3. SUSS Microtec MA6 (UV4) mask aligner (under a Class 100 laminar flow hood)
  1. Veeco Dektak Surface Profiler
  1. Jipelec Jetfirst 100 Rapid Annealing Furnace
  1. Metalizer
  2. Zeiss Supra 40 scanning electron microscope equipped with a Raith Elphy electron lithography system
  3. MEB JEOL 7000F (EDX, Cathodoluminescence)
  4. FTIR (non-cleanroom)