The clean room is a room with controlled atmosphere (temperature, humidity and dust), in slight overpressure relative to the outside (the class is the number of particles one micron or less per cubic foot).

Plan de la salle blanche vue avant
3D plan of the clean room, front view
Plan de la salle blanche vue arriere
3D plan of the clean room, rear view
  1. Oxford System RIE-ECR 100 high density plasma ion etching frame
  1. Frame Alliance Comcept EVA 450 deposition by electron gun
  2. RIBER Joule Evaporation Deposition Frame
  3. RCM sputter deposition frame
  1. Class 100 laminar flow hoods (Chemical treatment)
  2. SPS POLOS SPIN150i Spinner (Sample cleaning)
  3. Class 100 laminar flow hoods (Solvent - Cleaning)
  4. Class 100 laminar flow hoods with Karl Süss RC8 Gyrset and SUSS tourniquet SsR Labspin6 (Spreading resin)
  1. CORIAL ICP-RIE 210IL frame for high density plasma etching
  1. Memmert UN30Plus drying oven
  1. Karl Süss MJB3 Mask Aligner (Class 100 underblower)
  2. Reichert Polyvar microscope (ceiling fan class 100)
  3. SUSS Microtec MA6 (UV4) mask louver (under ceiling fan class 100)
  1. Surface profilometer Veeco Dektak 8
  1. Fast annealing oven Jipelec Jetfirst 100
  1. Metalizer
  2. Zeiss Supra 40 electronic lithography system equipped with a Raith Elphy system
  3. MEB JEOL 7000F (EDX, Cathodoluminescence)
  4. FTIR (outside clean room)