⋄ Designing SiC Based CMUT Structures: An Original Approach and Related Materials Issues
M. Portail, S. Chenot, M. Ghorbanzadeh-Bariran, R. Khazaka, L. Nguyen, D. Alquier and J.F. Michaud
Mat. Sci. For., 1062,
94-98, (2022)
- Article de conférence
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⋄ Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing3C-SiC membranes
R. Khazaka, J.-F. Michaud, P. Vennéguès, D. Alquier, and M. Portail
Appl. Phys. Lett., 110,
081602, (2017)
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⋄ On the interplay between Si(110) epilayer atomic roughness and subsequent 3C-SiCgrowth direction
R. Khazaka, J.-F. Michaud, P. Vennéguès, L. Nguyen, D. Alquier, and M. Portail
J. Appl. Phys., 120,
185306, (2016)
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⋄ Realization of minimum number of rotational domains in heteroepitaxied Si(110) on 3C-SiC(001)
R. Khazaka, M. Grundmann, M. Portail, P. Vennéguès, M. Zielinski, T. Chassagne, D. Alquier, and J.F. Michaud
Appl. Phys. Lett., 108,
011608, (2016)
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⋄ Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate
R. Khazaka, E. Bahette, M. Portail, D. Alquier, J.-F. Michaud
Mater. Lett., 160,
28-30, (2015)
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⋄ Direct insight into grains formation in Si layers grown on 3C-SiC by chemical vapor deposition
R. Khazaka, M. Portail, P. Vennéguès, D. Alquier, J.F. Michaud
Acta Mater., 98,
336, (2015)
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⋄ Structural investigation of Si quantum dots grown by CVD on AlN/Si(111) and 3C-SiC/Si(100) epilayers
R. Dagher, R. Khazaka, S. Vézian, M. Teisseire, A. Michon, M. Zielinski, T. Chassagne, Y. Cordier, M. Portail
Mat. Sci. For., 821-823,
1003, (2015)
- Article de conférence
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⋄ Silicon growth on 3C-SiC(001)/Si(001): pressure influence and thermal effect
R. Khazaka, M. Portail, P. Vennéguès, M. Zielinski, T. Chassagne, D. Alquier, J.F. Michaud
Mat. Sci. For., 821-823,
978, (2015)
- Article de conférence
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